YoungSin RF Generator YSR-50MC
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YSR-50MC is the 5KW RF Generator. Due to modular design, it’s possible to reduce lead time. Using high quality parts, long product life is guaranteed and chance of malfunction is minimalized. Multi protection functions is added for reliability of the product. That’s why this product can be utilized in various and specific applications, such as CVD(PE-CVD, ICP-CVD), PEALD, Etcher(RIE, ICP-RIE), Asher, RF Sputter, Atmospheric Pressure Plasma and so on. |
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YoungSin Matching Network AMN-150A-FA
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AMN-150A-FA is the Matching Network Unit which is rated at 5KW max. Due to modular design, it’s possible to reduce lead time. Using high quality and qualified parts, long product life is guaranteed and chance of malfunction is minimalized. For matching control, because of Preset Matching position, Auto Matching control within 2 seconds can be fully operational. In addition, Full digital Matching Software can enable users to adjust Matching position value more precisely. |
Features
YSR-50MC
- Modular Design to reduce lead time.
- User-friendly Operation mode including Step 1,2,3 mode.
- VFD screen to check RF power status in real time.
- Various applications- CVD(PE-CVD, ICP-CVD), PEALD, Etcher(RIE, ICP-RIE), Asher, RF Sputter, Atmospheric Pressure Plasma
- Use of AMP module for stable and high RF power delivery.
- Multi protection functions- Sensor detection and automatic control against over RF power, over voltage, over heat and the rest.
AMN-150A-FA
- Possible to select full digital matching method.
- Matching Speed: Auto Matching within 2 seconds.
- Use of Stepping Motor to upgrade accuracy and speed.
- Possible to adjust matching control positions on self-developed Full Digital Matching Software.
Specification
YSR-50MC
Input Voltage |
220V |
Output RF Power |
5KW |
Impedance |
50[Ω] |
Frequency |
13.56MHz/27.12MHz |
Size |
483mm (W) x 610mm (L) x 177mm (H) |
Weight |
40.3kg |
Cooling Method |
Water Cooling |
RF Output Connector |
7/16 Din Type |
Communication Protocol |
ANALOG Subminiature 15-Pin D-Sub & RS232 Subminiature 9-Pin D-Sub |
Power Mode |
SMPS (Switch Mode Power Supply |
AMN-130A-FA
RF Power Range |
10W-3KW |
Impedance |
50[Ω] |
Frequency |
2MHz/4MHz/13.56MHz/27.12MHz/40.68MHz |
Size |
280mm (W) x 350mm (L) x 150mm (H) |
Weight |
10kg |
Cooling Method |
Water Cooling |
Turning Range |
10-1000[Ω] |
RF Output Connector |
Connector/Ceramic/Copper/Bar |
Load/Tune |
2 VVC |
Matching Control |
Digital Matching Control |
